Entegris Receives Order for PFA Products for New 300 mm Fab

Aug. 13, 2004

Entegris Inc., in some markets better known by its previous name Fluoroware,  has received orders totaling over $1 million from U.S. and European original equipment manufacturers (OEMs) for its ultra-high purity Integra  valves, Flaretek fittings and Fluoroline tubing in a new semiconductor fabrication facility in Germany.

The SEMI  F57-compliant products will be used in the fab’s chemical blending stations, chemical distribution stations and in point-of-use production equipment.

"Fabs strive to improve yields, increase efficiencies, reduce costs and increase reliability, they continue to trust the leadership of Entegris for their critical fluid handling needs," said Patrick McKinney, president of Entegris' semiconductor market sector. 

The company’s fluid handling product lines include valves, fittings, tubing and chemical containers, along with sensing and control products. Additional information can be found at www.entegris.com.